MAE 183B Introduction to Microscale and Nanoscale Manufacturing Midterm Exam

Online MAE 183B

Part I: Closed Book/Notes

(6 problems, 10 pts each)

Instructor YS Ju

1. If the number of particles of size 0.5 µm in a class 1000 cleanroom is n per cm3, how many

particles ofsize 0.5 µm will you find in a class 1 cleanroom per cm3?

2. What is doping? What are the two types...